Vacuum Pad, Standard Small Type, VPMA, One-touch Fitting Type
Caution
- Some of the items are scheduled to be discontinued as of end of March in 2023. The manufacturer keep the items produced but they are not available with Misumi.
There are not the replacement items and the plan to resumption of sale. Please check the quotation and order screen for details.
Product Description
A small vacuum pad that is optimally suited for use in semiconductor manufacturing facilities. *The CAD data for this Series is being revised. This data will be made available as soon as the modifications have been completed.
[Features]
· Different pad types are available. These include a general type that is suited for flat work (non-flimsy/thick type work), a deep type that is suited for spherical fruits (apples, etc.) and balls, and a small type that is suited for small work and use inside semiconductor manufacturing facilities.
· This fitting is offered in a wide range of pad sizes, pad materials, and holder shapes.
· Pad holders have been added for applications that require the use of non-copper based metals and measures against low-concentration ozone.
· No copper-based metals are used in the metal component materials. HNBR is utilized for the rubber sealing material.
A Small Vacuum Pad Ideal For Use In Semiconductor Manufacturing Facilities
Pad material
Nitrile rubber, silicone rubber, urethane rubber, fluorine rubber, conductive silicone rubber, conductive butadiene rubber (low-resistance type), conductive NBR (low-resistance type), Food Sanitation Law-compliant NBR, HNBR, EPDM
Pad size
: Ø0.7 (diameter 0.7 mm), Ø1 (diameter 1 mm), Ø1.5 (diameter 1.5 mm), Ø2 (diameter 2 mm), Ø3 (diameter 3 mm), Ø4 (diameter 4 mm), Ø6 (diameter 6 mm), Ø8 (diameter 8 mm), Ø10 (diameter 10 mm), Ø15 (diameter 15 mm), Ø20 (diameter 20 mm), Ø25 (diameter 25 mm), Ø30 (diameter 30 mm), Ø40 (diameter 40 mm), Ø50 (diameter 50 mm), Ø60 (diameter 60 mm), Ø80 (diameter 80 mm), Ø100 (diameter 100 mm), Ø150 (diameter 150 mm), Ø200 (diameter 200 mm)
- *Static electricity-diffusing rubber and conductive rubber (low-resistance type) and Food Sanitation Law-compliant NBR are Ø1 to 50 (diameter 1 to 50 mm).
Fixed Type
| Vacuum Outlet, Upper | Vacuum Outlet, Horizontal | Direct Attachment | ||||
| Type | Standard | Small | Standard | Small | Standard | Small |
| Symbol | VPA | VPMA | VPB | VPMB | VPE | VPME |
Spring Type
| Vacuum Outlet, Upper | Vacuum Outlet, Horizontal | Direct Attachment | |||
| Type | Standard | Small | Standard | Small | Standard |
| Symbol | VPC | VPMC | VPD | VPMD | VPF |
Coupling size
| Single-action Coupling (mm) | Ø1.8, Ø3, Ø4, Ø6 |
|---|---|
| Barbed Coupling (Applicable Tube Outer Diameter × Inner Diameter) (mm) | Ø1.8 × Ø1, Ø3 × Ø2, Ø4 × Ø2.5, Ø6 × Ø4 |
Screw size
Flat female screws for pipes: Rp (G) 1/8, Rp s(G) 1/4
Standard shape for thick and flat workpieces. Deep shape ideal for round fruit (apples, etc.), bowls, etc.
Small pads can be used with semiconductor parts
Small holders downsized from existing vacuum pad holders (A, B, C, D and E types) to save space.
Also compatible with the optional fall prevention valve and directly attachable-type pad filters.
The pad can be changed without detaching the holder from the equipment.
Pad holders compatible with applications requiring no copper-based metal use and low concentration ozone measures are available.
No copper-based metals are used in the metal component materials, and HNBR is used for the rubber sealing material.
- *Pad material: Nitrile, conductive rubber (low resistance type) and Food Sanitation Law-compliant NBR are not suitable for low-concentration ozone measures.