Vacuum Pad, Suction Mark Prevention Type, VPA, One-touch Fitting Type
Caution
Product Description
* The CAD data for this series is being revised. This will be available as soon as modifications are complete.
[Features]
· Ideal for LCD glass, coating processes, and transport of semiconductor manufacturing equipment.
· The flexible resin material adheres to work.
· Unlikely to make adhesion marks.
· Also, the characteristic separation in a workpiece at the time of vacuum breakage will increase.
· You can replace the resin pad without spanners and hexagon wrenches to detach the main body.
· Simple and compact structure.
· A wide range of pad sizes, pad materials, and holder shapes are available.
· Pad holders were added to applications with "copper-based metal not used" and "reduce ozone concentrations” requirements.
· Copper-based metal is not used for metal parts. HNBR is used for sealing rubber material.
Dimensions
Standard table
| Model code | Pad O.D. ød | Tube O.D. øD | Thread M | B | L | Tube end C | Hex. H1 | Hex. H2 | Connection config. code |
|---|---|---|---|---|---|---|---|---|---|
| VPA10Q[5]-6J[9] | 10 | 6 | M12×1 | 40 | 18 | 11.7 | 14 | 12 | -M4 |
| VPA20Q[5]-3J | 20 | 3 | M12×1 | 50.6 | 19.9 | 10.9 | 14 | 12 | -M6 |
| VPA20Q[5]-4J[9] | 4 | ||||||||
| VPA20Q[5]-6J[9] | 6 | M14×1 | 41.6 | 19.5 | 11.7 | 17 | 14 | ||
| VPA30Q[5]-3J | 30 | 3 | M12×1 | 50.6 | 19.9 | 10.9 | 14 | 12 | |
| VPA30Q[5]-4J[9] | 4 | ||||||||
| VPA30Q[5]-6J[9] | 6 | M14×1 | 41.6 | 19.5 | 11.7 | 17 | 14 |
Units: mm
*[5]: Replaced with Pad rubber material code. Refer to the catalog for details.
*[9]: Replaced with "-S3" for -S3 spec. (Copper alloy free material for metal parts and FKM or HNBR for sealing parts).
*Tightening torque of a pad holder fixing bulkhead nut is as below.
▪Pad dia.: ø10 mm ▶ 12~14 N·m. ø20~30 mm ▶ 18~21 N·m