XY Table Mechanism

XY Table Mechanism

Optimal for adjusting errors when mounted to a vacuum container.
In addition to XY direction adjustments, it also includes angle adjustment function.


Japanese Only

Part Number

Configured Part Number is shown.


Part Number
Part NumberVolume DiscountDays to Ship
23 Day(s) or more


  1. 1

Basic Information

Introduction Machine Type For Angle Adjustor of Introduction Machine Flange Type CF/ICF Flange Size (Nominal) 70
Operating Pressure (Reference Value)(Pa) 1.0×10-8 Baking temperature(℃) 150 Helium Leak Volume 1x10-9Pa m3/s
Specifications Adjustment Range: XY direction ±5mm angle 0~5°

Please check the type/dimensions/specifications of the part TSN70 in the XY Table Mechanism series.

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