Air Operated Valve for Process Gas, AGD*1R/AGD*2R series
Caution
- The product images are representative only. Specifications may vary by part number, including shape and color.
Product Description
Air Operated Valve for Process Gas.
[Features]
· This is a core product of process gas valves featuring a metal diaphragm.
· Equipment for chemical gas supply systems, chemical liquid supply systems, semiconductor manufacturing processes, and N2 purge-related equipment
Drawing
AGD0*R-4RM
AGD0*R-4R
AGD1*R-4RM/AGD2*R-6RM
AGD1*R-4R/AGD2*R-6R
AGD1*R-4S/AGD2*R-6S
Product Specification
AGD01R/AGD02R
| Items | AGD01R | AGD02R |
|---|---|---|
| Operating fluid | inert gas / process gas | |
| Operating pressure Pa (abs) - MPa (G) | 1.3 x 10-6 to 0.99 | |
| Fluid temperature°C | 5 to 80 | |
| Operating ambient temperature°C | 5 to 80 | |
| Storage ambient temperature°C | -10 to 80 | |
| Valve seat leakage Pa·m3/s (He) | 1.0 x 10-10 or less | |
| External leakage Pa·m3/s (He) | 2.8 x 10-12 or less | |
| Cv value (23°C, pressurized) | 0.1 | |
| Connection method | 1/4" JXR male fitting 1/4" JXR female fitting | |
| Operation method | NC type (normally closed) | NO type (normally open) |
| Operating pressure (MPa) | 0.4 to 0.6 | 0.4 to 0.5 |
| Operating port | M5 | |
| Weight kg | 0.15 *1 | |
*1: Value for AGD01R-4RM (1/4" JXR male fitting).
AGD1*R/AGD2*R
| Items | AGD1*R | AGD2*R |
|---|---|---|
| Operating fluid | inert gas / process gas | |
| Operating pressure Pa (abs) - MPa (G) | 1.3 x 10-6 to 0.99 | |
| Fluid temperature°C | 5 to 80 | |
| Operating ambient temperature°C | 5 to 80 | |
| Storage ambient temperature°C | -10 to 80 | |
| Valve seat leakage Pa·m3/s (He) | 1.0 x 10-10 or less | |
| External leakage Pa·m3/s (He) | 2.8 x 10-12 or less | |
| Cv value (23°C, pressurized) | 0.3 | 0.65 |
| Connection method | 1/4" JXR male fitting 1/4" JXR female fitting 1/4" double compression fitting | 3/8" JXR male fitting 3/8" JXR female fitting 3/8" double compression fitting |
| Operation method | NC type (normally closed) NO type (normally open) | NC type (normally closed) NO type (normally open) |
| Operating pressure (MPa) | NC: 0.4 to 0.6 NO: 0.4 to 0.5 | NC: 0.4 to 0.6 NO: 0.4 to 0.5 |
| Operating port | M5 | |
| Weight kg | 0.26 Note 1 | 0.59 Note 1 |
Note 1: Value for AGD11R-4RM (1/4" JXR male fitting) and AGD21R-6RM (3/8" JXR male fitting).
Material used for gas-contacting parts
| Product number | Part name | Material |
|---|---|---|
| (1) | Diaphragm | Ni-Co alloy |
| (2) | Valve sheet | PCTFE |
| (3) | Body | SUS316L |
| Product number | Part name | Material |
|---|---|---|
| (1) | Diaphragm | Ni-Co alloy |
| (2) | Valve sheet | PCTFE |
| (3) | Body | SUS316L |
Specifications Table
AGD0*R-4RM
AGD0*R-4R
AGD1*R-4RM/AGD2*R-6RM
AGD1*R-4R/AGD2*R-6R
AGD1*R-4S/AGD2*R-6S
Product Feature Details
AGD01R/AGD02R
*1: JXR fittings can be connected to VCR fittings.
*2: The lifespan applies when the fluid used is an inert gas within the specified range and does not contain solid substances such as reaction byproducts.
AGD1*R/AGD2*R
*1: JXR fittings can be connected to VCR fittings.
*2: The lifespan applies when the fluid used is an inert gas within the specified range and does not contain solid substances such as reaction byproducts.