Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLFV Series, Air Operated Type, With Solenoid Valve
Brand :
SMC
Caution
- Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.
- Some of the items are scheduled to be discontinued as of end of March in 2023. The manufacturer keep the items produced but they are not available with Misumi.
There are not the replacement items and the plan to resumption of sale. Please check the quotation and order screen for details. - Refer to the manufacturer's catalog for specification and material details.
- The product images may be representative images only. Refer to the manufacturer's catalog for shape details.
Product Description
[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)
Drawing
Product Specifications
Product Specifications
| Part number | XLF (V)-16-2 | XLF (V)-25-2 | XLF (V)-40-2 | XLF (V)-50-2 | XLF (V)-63-2 | XLF (V)-80-2 | |
|---|---|---|---|---|---|---|---|
| Valve Type | Normally closed (pressurize to open, spring seal) | ||||||
| Operating fluid | Inert gas vacuum | ||||||
| Operating temperature °C | 5 to 50 | ||||||
| Operating Pressure Pa (abs) | 1 × 10^-5 to atmospheric pressure | ||||||
| Conductance L/s^*1) | 5 | 14 | 45 | 80 | 160 | 200 | |
| Leakage Pa · m^3/s | Internal | For standard material (FKM) 1.3 × 10^-10 At room temperature, excluding gas permeation | |||||
| External | For standard material (FKM) 1.3 × 10^-10 At room temperature, excluding gas permeation | ||||||
| Flange Type | KF (NW) | KF (NW)·K (DN) | |||||
| Main materials^*2) | Main body: aluminum alloy main part: stainless steel, FKM (standard sealing material) | ||||||
| Surface Treatment | External: hard anodized aluminum, Internal: base material | ||||||
| Pilot pressure MPa (G) | 0.4 to 0.7 | ||||||
| Pilot Port Connection port diameter | M5: 1 (P) / 3 (R) ports | Rc1/8: 1 (P) port, M5: 3 (R) ports | |||||
| Weight (kg) | 0.34 | 0.54 | 1.3 | 2.0 | 3.4 | 5.8 | |
Note 1: Conductance is the same as that of an elbow with the same dimensions.
*2) Vacuum grease [Y-VAC2] is applied to the sliding part of the seal of the vacuum part.
Standard table
