Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series
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- ■ SMC Product Line
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■ Products Planned for Online Release
Air cylinder-related product pages will be released on this site on an ad-hoc basis.
CQ2/MG types, etc., are already available.
*Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
*The information above is correct as of December 2018. - Some of the items are scheduled to be discontinued as of end of March in 2023. The manufacturer keep the items produced but they are not available with Misumi.
There are not the replacement items and the plan to resumption of sale. Please check the quotation and order screen for details. - The product images may be representative images only. Refer to the manufacturer's catalog for shape details.
Product Description
A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)
・ Achieves system compactness and piping savings
・ Prevents dust from rolling up in the chamber when exhausting
・ Adjustable initial exhaust valve flow rate
・ Air operated type / with solenoid valve
・ Since there is little outgas, the pump capacity can be small and the exhaust time can be shortened
・ It does not contain heavy metals such as Ni (nickel) and Cr (chromium), and the sputtering rate is low, so there is little heavy metal contamination on the wafer
・ Strong against fluorine
· Uniform baking temperature. Good thermal conductivity, uniform temperature throughout the body, drastically reducing product adhesion
· Lightweight and compact
Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting, Bellows Seal, O-Ring Seal, XLD Series Specifications
XLD Series external appearance
XLD Series operating port direction
| Model | XLD-25 | XLD-40 | XLD-50 | XLD-63 | XLD-80 | |
|---|---|---|---|---|---|---|
| Valve Type | Always closed (spring return and seal) (both main and initial exhaust valves) | |||||
| Fluids | Inert gas vacuum | |||||
| Operating Temperature (°C) | XLD | 5 to 60 (5 to 150 for high temperature type) | ||||
| Operating Pressure Pa (abs) | 1 × 10-6 to atmospheric pressure | |||||
| Conductance L/s Note 1: | Main Exhaust Valve | 14 | 45 | 80 | 160 | 200 |
| Initial Exhaust Valve | 0.5 to 3 | 2 to 8 | 2.5 to 11 | 4 to 18 | 4 to 18 | |
| Amount of leakage Pa·m3/s | Internal | For standard material (FKM): 1.3 × 10-10, values at normal temperature and excluding gas permeation | ||||
| External | For standard material (FKM): 1.3 × 10-11, values at normal temperature and excluding gas permeation | |||||
| Flange Type | KF (NW) | KF (NW) / K (DN) | ||||
| Main Material Note 3: | Main body: aluminum alloy, Bellows: SUS316L, Main parts: stainless steel, FKM (standard sealing material) | |||||
| Surface Treatment | External: hard anodized aluminum, Internal: base material | |||||
| Pilot Pressure MPa (G) | 0.4 to 0.7 (both main and initial exhaust valves) | |||||
| Pilot Port Connection Port Diameter | XLD | M5 | Rc 1/8 | |||
| Weight (kg) | XLD | 0.5 | 1.2 | 1.8 | 3.4 | 5.6 |
Note 1: The main exhaust valve conductance is the value for the "molecular flow" of an elbow with the same dimensions. The initial exhaust valve conductance is the "viscous flow" value.
Note 2: For valve heater specifications, see "Common Option (1) Heater" in the manufacturer's catalog.
Note 3: A coating of vacuum grease (Y-VAC2) has been applied to the seal-material sliding section (initial exhaust valve sliding part) of the vacuum part.
Product Drawing
XLD air-operated type dimensional drawing
(Unit: mm)
| Model | A | B | C | D | E | Fn | Fd | G | H | J | K |
|---|---|---|---|---|---|---|---|---|---|---|---|
| XLD-25 | 50 | 123 | 48 | 1 | 12 | 40 | - | 26 | 41 | 16 | 7.5 |
| XLD-40 | 65 | 170 | 66 | 2 | 11 | 55 | - | 41 | 63 | 20 | 15 |
| XLD-50 | 70 | 183 | 79 | 2 | 11 | 75 | - | 52 | 68 | 20 | 17.5 |
| XLD-63 | 88 | 217 | 100 | 3 | 11 | 87 | 95 | 70 | 72 | 20 | 20 |
| XLD-80 | 90 | 256 | 117 | 3 | 11 | 114 | 110 | 83 | 98 | 20 | 26.5 |
Note 1: Dimension E applies when heater option is included. (Lead wire length: approx. 1 m)
Note 2: A, B, and C in the figure above indicate the heater mounting positions. The heater mounting positions differ by the heater type. Refer to the manufacturer's catalog for replacement heater part numbers and mounting positions.
Product Diagram
XLD Series diagram
*Refer to the manufacturer's catalog for maintenance parts.
Product Working Principle
Initial exhaust valve conductance settings graph
- 1. Initial exhaust valve opening adjustment
Adjust the initial exhaust rate before use without applying pilot pressure to pilot port S. Set the initial exhaust rate to zero by turning the adjustment nut clockwise until it stops. (Do not use tools.) Adjust the initial exhaust rate by turning the adjustment nut counterclockwise. - 2. Opening of the initial exhaust valve (valve S)
When pilot pressure is applied to pilot port S, valve S separates from the valve S seal assembly and opens by the adjusted amount. - 3. Opening of the main exhaust valve (valve M)
When pilot pressure is applied to pilot port M, the M valve separates from the body seat section and opens fully. - 4. Closing of the initial and main exhaust valves
Remove the pilot pressure from pilot port S and pilot port M to return the S and M valves to their previous positions and seal them.
Note: The adjustment nut does not rotate during valve operation. However, rotation of the adjustment nut can be fixed to prevent operation errors. To fix the adjustment nut after setting it, tighten it to the torque shown under "A" Section Thread Tightening Torque" below. (Applying excessive torque can result in damaged components or abnormal noises.)
""A" Section Thread Tightening Torque
- XLD-25/XLD-40/XLD-50: 0.08 N·m (0.8 kgf·cm) or less
- XLD-63/XLD-80: 0.3 N·m (3 kgf·cm) or less
Product Options Descriptions
- Auto switch (for main exhaust valve)
The magnet actuates the auto switch. Uses 2 auto switches to detect the "opening and closing" positions and 1 auto switch to detect one of either the "open" or "closing" position. Auto switches operate at ordinary temperatures only (5 to 60°C). - Heater
Simple heating using thermistors. The valve body can be heated to 100°C or 120°C, but this will differ depending on the valve size. The type and number of thermistors used will vary depending on the size and temperature setting. For high temperature specifications, the bonnet assembly is a heat resistant structure. This is not applicable for types with solenoid valves.
Notes
- *The body material is A6063, the bellows material is SUS316L and the metal material used for other vacuum parts is SUS304. The standard seal material for vacuum parts is FKM, but other materials can be selected (see section on part number notation). Check that the fluid in use will not damage the selected material.
- *Select a heat resistance for the actuation pressure tubing materials and fittings that is appropriate for the given operating temperature.
- *The temperature of the switch part on the auto switch must be no higher than 60°C.
- *When using with heaters (thermistors), install a device for preventing overheating.
- *Refer to the manufacturer's catalog for parts other than those detailed above.