Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve
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*The information above is correct as of December 2018. - The product images may be representative images only. Refer to the manufacturer's catalog for shape details.
Product Description
A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve).
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Air-operated type with solenoid valve.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.
Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting, Bellows Seal, O-Ring Seal, XLDV Series, Air-Operated Type with Solenoid Valve Specifications
XLDV Series external appearance
XLDV Series operating port direction
| Model | XLD (V)-25 | XLD(V)-40 | XLD(V)-50 | XLD(V)-63 | XLD(V)-80 | |
|---|---|---|---|---|---|---|
| Valve Type | Always closed (spring return and seal) (both main and initial exhaust valves) | |||||
| Fluids | Inert gas vacuum | |||||
| Operating Temperature (°C) | XLDV | 5 to 60 (5 to 150 for high temperature type) | ||||
| 5 to 50 | ||||||
| Operating Pressure Pa (abs) | 1 × 10-6 to atmospheric pressure | |||||
| Conductance L/s Note 1: | Main Exhaust Valve | 14 | 45 | 80 | 160 | 200 |
| Initial Exhaust Valve | 0.5 to 3 | 2 to 8 | 2.5 to 11 | 4 to 18 | 4 to 18 | |
| Amount of leakage Pa·m3/s | Internal | For standard material (FKM): 1.3 × 10-10, values at normal temperature and excluding gas permeation | ||||
| External | For standard material (FKM): 1.3 × 10-11, values at normal temperature and excluding gas permeation | |||||
| Flange Type | KF (NW) | KF (NW) / K (DN) | ||||
| Main Material Note 3: | Main body: aluminum alloy, Bellows: SUS316L, Main parts: stainless steel, FKM (standard sealing material) | |||||
| Surface Treatment | External: hard anodized aluminum, Internal: base material | |||||
| Pilot Pressure MPa (G) | 0.4 to 0.7 (both main and initial exhaust valves) | |||||
| Pilot Port Connection Port Diameter | XLDV | M5: 1 (P), 3 (R) ports | ||||
| Weight (kg) | XLDV | 0.57 | 1.3 | 1.9 | 3.5 | 5.7 |
Note 1: The main exhaust valve conductance is the value for the "molecular flow" of an elbow with the same dimensions. The initial exhaust valve conductance is the "viscous flow" value.
Note 2: For valve heater specifications, see "Common Option (1) Heater" in the manufacturer's catalog.
Note 3: A coating of vacuum grease (Y-VAC2) has been applied to the seal-material sliding section (initial exhaust valve sliding part) of the vacuum part.
Product Drawing
(Unit: mm)
XLDV-25 type with solenoid valve dimensional drawing
XLDV-40, XLDV-50, XLDV-63, XLDV-80 type with solenoid valve dimensional drawing
| Model | A | B | C | Fn | Fd | G | M | N | K |
|---|---|---|---|---|---|---|---|---|---|
| XLDV-40 | 65 | 170 | 66 | 55 | - | 41 | 48.5 | 53.5 | 15 |
| XLDV-50 | 70 | 183 | 79 | 75 | - | 52 | 55 | 57.5 | 17.5 |
| XLDV-63 | 88 | 217 | 100 | 87 | 95 | 70 | 66.5 | 72.2 | 20 |
| XLDV-80 | 90 | 256 | 117 | 114 | 110 | 83 | 75 | 82.6 | 26.5 |
Product Diagram
Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting, Bellows Seal, O-Ring Seal diagram
XLDV-25 type with solenoid valve diagram
XLDV-40, XLDV-50, XLDV-63, XLDV-80 type with solenoid valve diagram
*Refer to the manufacturer's catalog for maintenance parts.
Product Working Principle
Initial exhaust valve conductance settings graph
- 1. Initial exhaust valve opening adjustment
Adjust the initial exhaust rate before use without applying pilot pressure to pilot port S. Set the initial exhaust rate to zero by turning the adjustment nut clockwise until it stops. (Do not use tools.) Adjust the initial exhaust rate by turning the adjustment nut counterclockwise. - 2. Opening of the initial exhaust valve (valve S)
Pilot pressure is constantly applied to the 1 (P) port. The valve opens by the adjusted amount when the initial exhaust solenoid valve is turned ON. - 3. Opening of the main exhaust valve (valve M)
Pilot pressure is constantly applied to the 1 (P) port. The valve opens fully when the main exhaust solenoid valve is turned ON. - 4. Closing of the initial and main exhaust valves
Turning off the initial and main exhaust solenoid valves resets the S and M valves and creates a seal.
Note: The adjustment nut does not rotate during valve operation. However, rotation of the adjustment nut can be fixed to prevent operation errors. To fix the adjustment nut after setting it, tighten it to the torque shown under "A" Section Thread Tightening Torque" below. (Applying excessive torque can result in damaged components or abnormal noises.)
""A" Section Thread Tightening Torque
- XLD-25V/XLDV-40/XLDV-50: 0.08 N·m (0.8 kgf·cm) or less
- XLDV-63/XLDV-80: 0.3 N·m (3 kgf·cm) or less
Product Options Descriptions
- Auto switch (for main exhaust valve)
The magnet actuates the auto switch. Uses 2 auto switches to detect the "opening and closing" positions and 1 auto switch to detect one of either the "open" or "closing" position. Auto switches operate at ordinary temperatures only (5 to 60°C). - Heater
Simple heating using thermistors. The valve body can be heated to 100°C or 120°C, but this will differ depending on the valve size. The type and number of thermistors used will vary depending on the size and temperature setting. For high temperature specifications, the bonnet assembly is a heat resistant structure. This is not applicable for types with solenoid valves.
Notes
- *The body material is A6063, the bellows material is SUS316L and the metal material used for other vacuum parts is SUS304. The standard seal material for vacuum parts is FKM, but other materials can be selected (see section on part number notation). Check that the fluid in use will not damage the selected material.
- *Select a heat resistance for the actuation pressure tubing materials and fittings that is appropriate for the given operating temperature.
- *The temperature of the switch part on the auto switch must be no higher than 60°C.
- *When using with heaters (thermistors), install a device for preventing overheating.
- *For types with a solenoid valve, keep the solenoid valve part at a temperature no higher than 50°C.
- *Refer to the manufacturer's catalog for product information not detailed above.