Stainless Steel High Vacuum L-Shaped, Straight Valve, Two-Stage Control, Single Acting, Bellows, O-Ring Seal, XMD/XYD

Brand :

SMC

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CQ2/MG types, etc., are already available.
*Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
*The information above is correct as of December 2018.
The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

Product Description

A vacuum valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Body material: SCS13 (SUS304 equivalent).
· Precision-cast single-piece structure which helps prevent gas accumulation.
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.

Stainless Steel High Vacuum Angle Valves / In-Line Valve, 2-Stage Control, Single Acting / Bellows Seal, O-Ring Seal, XMD/XYD Series Specifications

Angle valve XMD Series external appearance

Angle valve XMD series pilot port direction

In-line type XYD series external appearance

In-line type XYD series pilot port direction

Model		XMD-25 XYD-25	XMD-40 XYD-40	XMD-50 XYD-50	XMD-63 XYD-63	XMD-80 XYD-80
Flange (Valve) Size		25	40, CF070	50	63, CF114	80
Valve Type		Always closed (pressurize to open and spring seal) (both main and initial exhaust valves)
Fluids		Inert gas vacuum
Operating Temperature (°C)		5 to 60 (5 to 150 for high temperature type)
Operating Pressure Pa (abs)		1 × 10^-6 to atmospheric pressure
Conductance L/s ^{Note 1}	Main Exhaust Valve	14	45	80	160	200
Conductance L/s ^{Note 1}	Initial Exhaust Valve	0.5 to 3	2 to 8	2.5 to 11	4 to 18	4 to 18
Amount of leakage Pa·m³/s	Internal	For standard material (FKM): 1.3 × 10^-10, values at normal temperature and excluding gas permeation
Amount of leakage Pa·m³/s	External	For standard material (FKM): 1.3 × 10^-11, values at normal temperature and excluding gas permeation
Operating Time (s)	Main Exhaust Valve	0.10	0.21	0.24	0.26	0.28
Operating Time (s)	Initial Exhaust Valve	0.70	0.08	0.09	0.23	0.27
Flange Type		KF (NW)	KF (NW), CF	KF (NW)	KF (NW), K (DN), CF	KF (NW), K (DN)
Flange Type		KF (NW)	KF (NW), CF	KF (NW)	KF (NW), K (DN), CF	KF (NW), K (DN)
Main Material ^{Note 3}		Main body: SCS13 (SUS304 equivalent), Bellows: SUS316L, Major parts: SUS304, FKM (standard sealing material)
Pilot Pressure MPa (G)		0.4 to 0.7 (both main and initial exhaust valves)
Pilot Port Connection Port Diameter		M5	Rc 1/8
Weight kg ^{Note 2}	XMD	0.65	1.50 (1.86)	2.20	4.10 (5.46)	6.80
Weight kg ^{Note 2}	XYD	0.71	1.52	2.60	4.80	8.30

Note 1: The main exhaust valve conductance is the value for the “molecular flow” of an elbow with the same dimensions. The initial exhaust valve conductance is the “viscous flow” value.
Note 2: Figures in ( ) indicate the weight for CF (ConFlat) fittings.
Note 3: A coating of vacuum grease (Y-VAC2) has been applied to the seal-material sliding section (initial exhaust valve sliding part) of the vacuum part.

Product Drawing

(Unit: mm)

XMD angle type dimensional drawing

XYD in-line type dimensional drawing

Model	A	B	C	D	Fn	Fd	Fc	G	H	J	K	P.C.D. L1	L2
XMD-25	50	123	48	1	40	-	-	26	41	16	7.5	-	-
XMD-40	65	170	66	2	55	-	70	41	63	20	15	P.C.D 58.7	6 × ø6.6 mm
XMD-50	70	183	79	2	75	-	-	52	68	20	17.5	-	-
XMD-63	88	217	100	3	87	95	114	70	72	20	19.5	P.C.D 92.1	8 × ø8.4 mm
XMD-80	90	256	117	3	114	110	-	83	98	20	26.5	-	-

Model	A	B	C	D	E	Fn	Fd	G	H	J	K
XYD-25	100.2	86.7	48	1	23.5	40	-	26	66	16	7.5
XYD-40	130	114	66	2	38	55	-	41	84	20	15
XYD-50	178	128	79	2	53	75	-	52	95	20	17.5
XYD-63	209	163	100	3	61	87	95	70	121	20	19.5
XYD-80	268	193	117	3	80	114	110	83	144	20	26.5

Product Diagram

XMD angle type diagram

XYD in-line type diagram

*Refer to p. 497 of the manufacturer's catalog for maintenance parts.

Product Working Principle

1. Initial exhaust valve opening adjustment
Adjust the initial exhaust rate before use without applying pilot pressure to pilot port S. Set the initial exhaust rate to zero by turning the adjustment nut clockwise until it stops. (Do not use tools.) Adjust the initial exhaust rate by turning the adjustment nut counterclockwise. See figure to the right for the relationship between the number of adjustment nut rotations (pitch: 1 mm) and the initial exhaust valve conductance.
2. Opening of the initial exhaust valve (valve S)
When pilot pressure is applied to pilot port S, valve S separates from the valve S seal assembly and opens by the adjusted amount.
3. Opening of the main exhaust valve (valve M)
When pilot pressure is applied to pilot port M, the M valve separates from the body seat section and opens fully.
4. Closing of the initial and main exhaust valves
Remove the pilot pressure from pilot port S and pilot port M to return the S and M valves to their previous positions and seal them.

Graph showing number of adjustment nut rotations (pitch: 1 mm) and the initial exhaust valve conductance

Notes

*The body material is SCS13 (SUS304 equivalent), the bellows material is SUS316L and the metal material used for other vacuum parts is SUS304. The standard seal material for vacuum parts is FKM, but it can be changed for other materials (see section on part number notation). Check that the fluid in use will not damage the selected material.
*Select a heat resistance for the actuation pressure tubing materials and fittings that is appropriate for the given operating temperature.
*The temperature of the switch part must be no higher than 60°C.
*Refer to the manufacturer's catalog for product information not detailed above.