Vacuum Rodless Cylinder CYV Series

Vacuum Rodless Cylinder CYV Series Specifications

Vacuum Rodless Cylinder CYV Series external appearance

Vacuum Rodless Cylinder CYV Series example application

*The concept drawing above is an example showing how to install the cylinder. However, it is not to fulfill all the vacuum-chamber usage conditions.

Specifications

• Operating environment pressure: atmospheric to 1.3 × 10^-4 Pa (ABS)
• Operating environment atmosphere (*1): air and inert gases
• Operating fluid (*1): air and inert gases
• Operation type: double action
• Guaranteed proof pressure: 0.5 MPa
• Operating pressure range: 0.05 to 0.3 MPa
• Leak amount: 1.3 × 10^-7 Pa·m³/sec or less (at normal temperature, excluding gas permeation)
• Maximum baking temperature (*2, *3): 100°C
• Ambient and operating fluid temperature: -10 to +60°C (no freezing)
• Maximum operating piston speed (*4): 50 to 300 mm/s
• Stroke adjustable amount: Each side -2 to 0 mm (both sides -4 to 0 mm)
• Cushioning: sine cushion (air cushioning)
• Lubrication method: vacuum grease for linear guide and in cylinder tube

• *1 Air is recommended for the operating environment atmosphere and operating liquid. If using other inert gases, the product lifespan and other variables may vary. Contact the SMC support center for details.
• *2 This baking is limited to baking before cylinder operation. For cylinder operation, use a temperature range of -10 to +60°C.
• *3 Contact the SMC support center if the baking temperature is to exceed 100°C.
• *4 The operating piston speed above indicates the maximum speed. From the beginning of slide table movement at the stroke end until the end of the cushion stroke takes approx. 0.5 seconds (one side) or 1 second for both sides.

Product Features

Its non-contact structure ensures no contact between the outer surface of the cylinder tube and the inner surface of the slide table, eliminating the generation of dust caused by sliding friction

Special cylinder tube, long stroke (max 700 mm)

Uses a special cylinder tube made of extruded aluminum
As the cylinder is directly attached to the rail base, there is no deflection, even with long strokes. The use of a linear guide ensures this non-contact structure

O-ring seals separate the vacuum and atmosphere

*To allow fine adjustments to be made to the stroke, O-rings are installed to separate the vacuum from the atmosphere. Contact SMC if you require a different sealing method.

Can be fine-tuned at the end of the stroke
Fine adjustments can be made on one side (-2 to 0 mm) or both sides together (-4 to 0 mm)

Product Drawing

(Unit: mm)

Vacuum Rodless Cylinder CYV Series dimensional drawing

*See the individual product notes in the SMC catalog (cushioning effect [sine cushion] and stroke adjustment).

Product Structural Drawing

CYV15 structural drawing

CYV32 structural drawing

• *In the Materials and Notes columns of the list above, the first description is for CYV15, and the second description is for CYV32.

Precautions

• *Open the inner package of the double packaged clean series in a clean room or other clean environment.
• *Do not use bare hands to install the cylinder. Doing so can cause the outgassing characteristics to degrade.
• *Fully exhaust the compressed air in the piping outside of the clean room before replacing parts in the chamber or disassembling.
• *See the SMC catalog for product information other than that detailed above.