Compact flow sensor Rapiflow FSM3 series (stainless steel body type)
Caution
- The product images are representative only. Specifications may vary by part number, including shape and color.
Product Description
[Features]
· Ideal for inert gas management where outgassing is undesirable
· IO-Link model now available
· LCD display with rotating indication
· Wide variety of variations
· Easy installation (option)
· Space-saving
Drawing
(LCD Display Type) (Flow Rate Range: 500 mL/min to 50 L/min)
· Connection port diameter: straight type Rc1/8, G1/8, NPT1/8
- FSM3-L [B] [C] 2,3/AA1/AB1/AC1 (Full scale flow rate: 500 mL/min, 1, 2, 5, 10, 20, 50 L/min)
· Connection port diameter: Straight type G1/8
- FSM3-L [B] [C] 2,3/AF1 (Full-scale flow rate: 500 mL/min, 1, 2, 5, 10, 20, 50 L/min)
- FSM3-L [B] [C] 2,3/AD1 (Full scale flow rate: 500 mL/min, 1, 2, 5, 10, 20, 50 L/min)
- FSM3-L [B] [C] 2,3/AE1 (Full scale flow rate: 500 mL/min, 1, 2, 5, 10, 20, 50 L/min)
With needle valve
· Connection port diameter: Rc1/8, G1/8, NPT1/8, 1/4 inch double compression fitting, 1/4 inch JXR male fitting
- FSM3-L [B] [C] 2,3/AA1/AF1/AB1/AC1/AD/AE [G] [H] T (Full scale flow rate: 500 L/min, 1, 2, 5, 10, 20, 50 L/min)
(LCD display type) (flow rate range: 50 L/min to 200 L/min)
· Connection port diameter: straight type Rc1/4, G1/4, NPT1/4
- FSM3-L [B] [C] 2,3/BA1/BB1/BC1 (full scale flow rate: 50, 100, 200 L/min)
· Connection port diameter: straight type G1/4 (BF1)
- FSM3-L [B] [C] 2,3/BF1 (Full scale flow rate: 50, 100, 200 L/min)
- FSM3-L [B] [C] 2,3/BD1 (Full scale flow rate: 50, 100, 200 L/min)
- FSM3-L [B] [C] 2,3/BE1 (Full scale flow rate: 50, 100, 200 L/min)
With needle valve
· Connection port diameter: Rc1/4, G1/4, NPT1/4, 1/4 inch double compression fitting, 1/4 inch JXR male fitting
- FSM3-L [B] [C] 2,3/BA1/BF1/BB1/BC1/BD/BE [G] [H] T (Full scale flow rate: 50, 100, 200 L/min)
*The shape of the top and underside of the main body is the same as the straight type.
(LCD Display Type) (Flow Rate Range: 500 L/min, 1,000 L/min)
· Connection port diameter: straight type Rc1/2, G1/2, NPT1/2
- FSM3-L [B] [C] 2/CA1/CF1/CB1/CC1 (Full scale flow rate: 500, 1,000 L/min)
(Bar Display Type) (Flow Rate Range: 500 mL/min to 50 L/min)
· Connection port diameter: straight type Rc1/8, G1/8, NPT1/8
- FSM3-B [B] [C] 2,3/AA1/AB1/AC1 (Full scale flow rate: 500 mL/min, 1, 2, 5, 10, 20, 50 L/min)
· Connection port diameter: Straight type G1/8
- FSM3-B [B] [C] 2,3/AF1 (Full scale flow rate: 500 mL/min, 1, 2, 5, 10, 20, 50 L/min)
- FSM3-B [B] [C] 2,3/AD1 (Full scale flow rate: 500 mL/min, 1, 2, 5, 10, 20, 50 L/min)
- FSM3-B [B] [C] 2,3/AE1 (Full scale flow rate: 500 mL/min, 1, 2, 5, 10, 20, 50 L/min)
(Bar Display Type) (Flow Rate Range: 50 L/min to 1,000 L/min)
· Connection port diameter: Straight type Rc1/4, G1/4, NPT1/4
- FSM3-B [B] [C] 2,3/BA1/BB1/BC1 (Full scale flow rate: 50, 100, 200 L/min)
· Connection port diameter: Straight type G1/4
- FSM3-B [B] [C] 2,3/BF1 (Full scale flow rate: 50, 100, 200 L/min)
· Connection port diameter: Straight type 1/4 inch double compression fitting
- FSM3-B [B] [C] 2,3/BD1 (Full scale flow rate: 50, 100, 200 L/min)
· Connection port diameter: Straight type 1/4 inch JXR male fitting
- FSM3-B [B] [C] 2,3/BE1 (Full scale flow rate: 50, 100, 200 L/min)
· Connection port diameter: Straight type Rc1/2, G1/2, NPT1/2
- FSM3-B [B] [C] 2/CA1/CF1/CB1/CC1 (Full scale flow rate: 500, 1,000 L/min)
(IO-Link) (Flow rate range: 500 mL/min to 50 L/min)
· Connection port diameter: straight type Rc1/8, G1/8, NPT1/8
- FSM3-C [B] [C] 2,3/AA1/AB1/AC1 (Full scale flow rate: 500 mL/min, 1, 2, 5, 10, 20, 50 L/min)
· Connection port diameter: Straight type G1/8
- FSM3-C [B] [C] 2,3/AF1 (Full-scale flow rate: 500 mL/min, 1, 2, 5, 10, 20, 50 L/min)
- FSM3-C [B] [C] 2,3/AD1 (Full-scale flow rate: 500 mL/min, 1, 2, 5, 10, 20, 50 L/min)
- FSM3-C [B] [C] 2,3/AE1 (Full scale flow rate: 500 mL/min, 1, 2, 5, 10, 20, 50 L/min)
(IO-Link) (Flow rate range: 50 L/min to 1,000 L/min)
· Connection port diameter: straight type Rc1/4, G1/4, NPT1/4
- FSM3-C [B] [C] 2,3/BA1/BB1/BC1/ (Full scale flow rate: 50, 100, 200 L/min)
· Connection port diameter: straight type G1/4
- FSM3-C [B] [C] 2,3/BF1 (Full scale flow rate: 50, 100, 200 L/min)
- FSM3-C [B] [C] 2,3/BD1 (Full scale flow rate: 50, 100, 200 L/min)
- FSM3-C [B] [C] 2,3/BE1 (Full scale flow rate: 50, 100, 200 L/min)
· Connection port diameter: straight type Rc1/2, G1/2, NPT1/2
- FSM3-C [B] [C] 2/CA1/CF1/CB1/CC1 (Full scale flow rate: 500, 1,000 L/min)
Product Specification
Product Specification
| Items | FSMS3- [ A ] [B] [C] [D] [E] [F] [G] [ H ] [I] - [ ] | ||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| [B] | |||||||||||||
| 005 | 010 | 020 | 050 | 100 | 200 | 500 | 101 | 201 | 501 | 102 | |||
| Flow Direction | [C] | U | One-Way | ||||||||||
| B | Two-Way | ||||||||||||
| Flow Rate Range (B/min) *1 | [B] | U | 15 to 500 mL | 30 to 1,000 mL | 0.06 to 2.00 L | 0.15 to 5.00 L | 0.30 to 10.00 L | 0.6 to 20.0 L | 1.5 to 50.0 L | 3.0 to 100.0 L | 6 to 200 L | 15 to 500 L | 30 to 1,000 L |
| B | -500 to -15, 15 to 500 mL | -1,000 to -30, 30 to 1,000 mL | -2.00 to -0.06, 0.06 to 2.00 L | -5.00 to -0.15, 0.15 to 5.00 L | -10.00 to -0.30, 0.30 to 10.00 L | -20.0 to -0.6, 0.6 to 20.0 L | -50.0 to -1.5, 1.5 to 50.0 L | -100.0 to -3.0, 3.0 to 100.0 L | -200 to -6, 6 to 200L | -500 to -15, 15 to 500L | -1,000 to -30, 30 to 1,000 L | ||
| Type of Display | 4 digits + 4 digits 2-color LCD | ||||||||||||
| Flow rate display range (B/min) Note 2 | [B] | U | -49 to +549 mL | -99 to +1,099 mL | -0.19 to +2.19 L | -0.49 to +5.49 L | -0.99 to +10.99 L | -1.9 to +2.19 L | -4.9 to +54.9 L | -9.9 to +109.9 L | -19 to +219 L | -49 to +549 L | -99 to +1,099 L |
| B | -549 to +549 mL | -1,099 to +1,099 mL | -2.19 to +2.19 L | -5.49 to +5.49 L | -10.99 to +10.99 L | -2.19 to +2.19 L | -54.9 to +54.9 L | -10.9 to +109.9 L | -219 to +219 L | -549 to +549 L | -1,099 to +1,099 L | ||
| Totalized display Note 3 | Indicated range | 0 to ± 9999999 mL | 0.00 to ±99999.99 L | 0.0 to ±999999.9 L | 0 to ±9999999 L | ||||||||
| Pulse output rate | 5 mL | 10 mL | 0.02 L | 0.05 L | 0.1 L | 0.2 L | 0.5 L | 1L | 2L | 5L | 10L | ||
| Usage conditions | Compatible fluid Note 4 | Clean air (JIS B 8392-1:2012 1.1.1 to 5.6.2), compressed air (JIS B 8392-1:2012 1.1.1 to 1.6.2), nitrogen gas | |||||||||||
| Argon, carbon dioxide gas, mixed gas (argon + carbon dioxide gas) | - | ||||||||||||
| Oxygen (When the oxygen specification is selected, the clean specification (wa) cannot be selected. It will automatically be the degreasing process specification.) | - | ||||||||||||
| temperature range | 0 to +50°C (no condensation) | ||||||||||||
| Pressure range | -0.09 to 1.00 MPa | -0.09 to 0.75 MPa | |||||||||||
| Pressure resistance | 1.5 MPa | ||||||||||||
| Operating ambient temperature, humidity | 0 to +50°C, 90% RH or less | ||||||||||||
| Storage temperature | -10 to +60℃ | ||||||||||||
| Accuracy Note 5 (Fluid: using dry air) | Accuracy Note 6 | Within ±3% F.S. (outlet open air) (Guaranteed range depends on "measurement flow rate range") | |||||||||||
| Repeatability Note 7 | Within ±1% F.S. (outlet open air) | ||||||||||||
| Temperature characteristics | Within ±0.2% F.S./°C (15 to 35°C, 25°C reference) | ||||||||||||
| Pressure characteristics | ±5% F.S. or less (based on open air at outlet) | ±5% F.S. or less (based on 0.35 MPa) | |||||||||||
| Response time Note 8 | 50 msec or less (when response time setting is OFF) | ||||||||||||
| Switch Output | [G] | A, B, E, F | NPN open collector output (50 mA or less, voltage drop 2.4 V or less) | ||||||||||
| C, D, G, H | PNP open collector output (50 mA max, voltage drop 2.4 V max) | ||||||||||||
| Analog Output Note 9 | A, B, C, D | 1-5 V voltage output (load impedance 50 kΩ min) | |||||||||||
| E, F, G, H | 4-20 mA current output (load impedance 0 to 300 Ω) | ||||||||||||
| Power supply voltage Note 10 | A, B, C, D | DC 12 to 24 V (10.8 to 26.4 V), ripple rate 1% or less | |||||||||||
| E, F, G, H | 24 V DC (21.6 to 26.4 V), ripple rate 1% or less | ||||||||||||
| Current consumption Note 11 | 45 mA or less | ||||||||||||
| Lead | ⌀3.7 AWG26 equivalent x 5 cores (connector connection), insulator outer diameter ⌀1.0 | ||||||||||||
| Functions Note 12 | (1) Gas type switching, (2) Setting copy function, (3) Flow rate accumulation, (4) Peak hold, others | ||||||||||||
| Protective Structure | Equivalent to IP40 (IEC standard) | ||||||||||||
| Protective Circuit Note 13 | Reverse power supply connection protection, reverse switch output connection protection, switch output load short-circuit protection | ||||||||||||
| Vibration resistance | 10 to 150 Hz, Max. 100 m/s2, XYZ directions, 2 hours each | ||||||||||||
| EMC Directive | EN55011, EN61000-6-2, EN61000-4-2/3/4/6/8 | ||||||||||||
| Mounting | Mounting orientation Note 14 | Vertical / Horizontal Mounting | |||||||||||
| Direct introduction section Note 15 | N/A | ||||||||||||
Note 1: Converted to volumetric flow rate under standard conditions (20°C, 1 atm (101 kPa), 65% relative humidity). (For gases other than air: 20°C, 1 atm (101 kPa), 0% relative humidity)
Note 2: The display for each flow rate is as follows.
Note 3: The accumulated flow rate is a calculated (reference) value. When using the accumulation storage function, please ensure that the number of saves does not exceed the memory device's access limit (maximum of 1,000,000 times). (Changes to various settings are also counted as accesses.)
Number of saves = operating time / 5 minutes < 1,000,000 times
When the instantaneous flow rate is 1% or less, it is not counted as accumulated flow rate.
Note 4: Use dry gas that does not contain corrosive components such as chlorine, sulfur, or acids, and clean gas that does not contain dust or oil mist. When using compressed air, please use clean air of class 1.1.1 to 1.6.2 as specified in JIS B 8392-1:2012. Compressed air from compressors contains condensate (water, oxidized oil, contaminants, etc.). To maintain the functionality of this product, please install a filter, air dryer (min. pressure dew point 10°C or lower), and oil mist filter (maximum oil concentration 0.1 mg/m3) on the inlet (upstream) side of this product before use.
A dedicated model is available for oxygen gas. To prevent fire accidents, do not use oxygen again if any fluid other than oxygen has been used even once.
Note 5: Compressed air is used for adjustment and inspection of this product. For gases other than air, the accuracy is provided as a reference.
Note 6: The accuracy is based on CKD's standard flow meter and does not indicate absolute accuracy.
Please note that repeatability, temperature characteristics, and pressure characteristics are not included in the ±3% F.S. accuracy.
Please consider separately depending on the operating environment and usage conditions.
Note 7: This refers to repeatability over a short period. Changes over time are not included. (For details, please refer to the product specification sheet.)
Note 8: The actual response time varies depending on the piping conditions. The response time setting can be selected from approx. 50 msec to 1.5 sec as a reference.
Note 9: The output impedance of the analog output voltage output type is approx. 1 kΩ. If the impedance of the connected load is low, the output value and error will increase. Please check the error due to the impedance of the connected load before use.
Note 10: Please note that the power supply voltage specifications are different for voltage output type and current output type.
Note 11: This is the current when connected to 24 V DC with no load connected. Please note that the current consumption will change depending on the connection status of the load.
Note 12: With the gas type switching function, you can switch to argon, carbon dioxide, or argon 80% + carbon dioxide 20%. After switching, the full scale flow rate and analog output will be as shown below. (Please note that the gas type switching function cannot be set for the oxygen type, 500 L/min model, or 1,000 L/min model.)
| Gas Type | Flow Direction | Full scale flow rate | Analog output | |
|---|---|---|---|---|
| Voltage | Current | |||
| · Air · Nitrogen · Argon · Argon 80% + Carbon dioxide 20% | One-Way | 0 to 100% | 1 to 5 V | 4 to 20 mA |
| Two-Way | -100 to +100% | |||
| · Carbon dioxide | One-Way | 0 to 50% | 1 to 3 V | 4 to 20 mA |
| Two-Way | -50 to +50% | 2 to 4 V | 8 to 16 mA | |
The presence or absence of the "setting copy function" is selected in "(T) output specifications".
Please note that models with the "setting copy function" do not have the "external input" function.
Note 13: The protection circuit of this product is effective only against certain incorrect connections and load short-circuits, and does not protect against all types of incorrect connections.
Note 14: This product measures changes in heat distribution caused by flow.
When installed vertically, the heat distribution may change due to convection, which can cause the zero point to shift.
Note 15: Depending on the piping conditions, it may affect the accuracy. For more accurate measurement, provide a straight pipe section that is 10 times the inner diameter of the piping.
For the 500 L/min and 1,000 L/min models, use piping with an inner diameter of 9 mm or more. If the inner diameter is 9 mm or less, accuracy may diminish.
Note 16: For mass, please refer separately.
Product Specification
| Items | FSMS3- [ A ] [B] [C] [D] [E] [F] [G] [ H ] [I] - [ ] | ||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| [B] | |||||||||||||
| 005 | 010 | 020 | 050 | 100 | 200 | 500 | 101 | 201 | 501 | 102 | |||
| Flow Direction | [C] | U | One-Way | ||||||||||
| B | Two-Way | ||||||||||||
| Flow rate measurement range (B/min) Note 1 | [B] | U | 15 to 500 mL | 30 to 1,000 mL | 0.06 to 2.00 L | 0.15 to 5.00 L | 0.30 to 10.00 L | 0.6 to 20.0 L | 1.5 to 50.0 L | 3.0 to 100.0 L | 6 to 200 L | 15 to 500 L | 30 to 1,000 L |
| B | -500 to -15, 15 to 500 mL | -1,000 to -30, 30 to 1,000 mL | -2.00 to -0.06, 0.06 to 2.00 L | -5.00 to -0.15, 0.15 to 5.00 L | -10.00 to -0.30, 0.30 to 10.00 L | -20.0 to -0.6, 0.6 to 20.0 L | -50.0 to -1.5, 1.5 to 50.0 L | -100.0 to -3.0, 3.0 to 100.0 L | -200 to -6, 6 to 200L | -500 to -15, 15 to 500L | -1,000 to -30, 30 to 1,000 L | ||
| Type of Display | LED bar indication | ||||||||||||
| Usage conditions | Compatible fluid *2 | Clean air (JIS B 8392-1:2012 1.1.1 to 5.6.2), compressed air (JIS B 8392-1:2012 1.1.1 to 1.6.2), nitrogen gas | |||||||||||
| Oxygen (When the oxygen specification is selected, the clean specification (wa) cannot be selected. It will automatically be the degreasing process specification.) | - | ||||||||||||
| temperature range | 0 to +50°C (no condensation) | ||||||||||||
| Pressure range | -0.09 to +1.00 MPa | -0.09 to +0.75 MPa | |||||||||||
| Pressure resistance | 1.5 MPa | ||||||||||||
| Operating ambient temperature, humidity | 0 to +50°C, 90% RH or less | ||||||||||||
| Storage temperature | -10 to +60℃ | ||||||||||||
| Accuracy | Accuracy *3 | Within ±3% F.S. (outlet open air) (Guaranteed range depends on "measurement flow rate range") | |||||||||||
| Repeatability *4 | Within ±1% F.S. (outlet open air) | ||||||||||||
| Temperature characteristics | Within ±0.2% F.S./°C (15 to 35°C, 25°C reference) | ||||||||||||
| Pressure characteristics | ±5% F.S. or less (based on open air at outlet) | ±5% F.S. or less (based on 0.35 MPa) | |||||||||||
| Response time *5 | 50 ms or less | ||||||||||||
| Analog output *6 | [G] | J | 1-5 V voltage output (connection load impedance = 50 kΩ or more) | ||||||||||
| K | 4-20 mA current output (load impedance 0 to 300 Ω) | ||||||||||||
| Power supply voltage *7 | J | DC 12 to 24 V (10.8 to 26.4 V), ripple rate 1% or less | |||||||||||
| K | 24 V DC (21.6 to 26.4 V), ripple rate 1% or less | ||||||||||||
| Current consumption *8 | 45 mA or less | ||||||||||||
| Lead | ⌀3.7 AWG26 equivalent x 4 cores (connector connection), insulator outer diameter ⌀1.0 | ||||||||||||
| Protective Structure | Equivalent to IP40 (IEC standard) | ||||||||||||
| Protection circuit Note 9 | Power supply reverse connection protection | ||||||||||||
| Vibration resistance | 10 to 150 Hz, Max. 100 m/s2, XYZ directions, 2 hours each | ||||||||||||
| EMC Directive | EN55011, EN61000-6-2, EN61000-4-2/3/4/6/8 | ||||||||||||
| Mounting | Mounting orientation Note 10 | Vertical / Horizontal Mounting | |||||||||||
| Direct introduction section Note 11 | N/A | ||||||||||||
Note 1: Converted to volumetric flow rate under standard conditions (20°C, 1 atm (101 kPa), 65% relative humidity)
(For gases other than air: 20°C, 1 atm (101 kPa), 0% relative humidity)
note2: Please use clean, dry gas that does not contain corrosive components such as chlorine, sulfur, or acids, and that is free of dust and oil mist. When using compressed air, please use clean air conforming to JIS B 8392-1: 2012 class 1.1.1 to 1.6.2. Compressed air from compressors contains condensate (water, oxidized oil, contaminants, etc.). To maintain the functionality of this product, please install a filter, air dryer (min. pressure dew point 10°C or lower), and oil mist filter (maximum oil concentration 0.1 mg/m3) on the inlet (upstream) side of this product before use. (Please refer to the recommended circuit.)
A dedicated model is available for oxygen gas. To prevent fire accidents, do not use oxygen again if any fluid other than oxygen has been used even once.
Note 3: Accuracy is based on CKD's standard flow meter and does not indicate absolute accuracy. Please note that repeatability, temperature characteristics, and pressure characteristics are not included in the ±3% F.S. accuracy.
Please consider separately depending on the operating environment and usage conditions.
Note 4: This refers to repeatability over a short period. Changes over time are not included. (For details, please refer to the product specification sheet.)
Note 5: The actual response time varies depending on the piping conditions.
Note 6: The output impedance of the analog output voltage output type is approx. 1 kΩ. If the impedance of the connected load is low, the output value and error will increase. Please check the error due to the impedance of the connected load before use.
Note 7: Please note that the power supply voltage specifications of the voltage output type and current output type are different.
Note 8: This is the current when connected to 24 V DC with no load connected. Please note that the current consumption will change depending on the connection status of the load.
Note 9: The protection circuit of this product is effective only against certain incorrect connections and load short-circuits, and does not protect against all types of incorrect connections.
Note 10: This product measures changes in heat distribution caused by flow.
When installed vertically, the heat distribution may change due to convection, which can cause the zero point to shift.
Note 11: Under certain piping conditions, accuracy may be affected. For more accurate measurement, provide a straight pipe section that is 10 times the inner diameter of the piping.
For the 500 L/min and 1,000 L/min models, please use piping with an inner diameter of 9 mm or more. If the inner diameter is 9 mm or less, accuracy may diminish.
Note 12: For mass, please refer to a separate table.
Product Specification
| Items | FSMS3- [ A ] [B] [C] [D] [E] [F] [G] [ H ] [I] - [ ] | ||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| [B] | |||||||||||||
| 005 | 010 | 020 | 050 | 100 | 200 | 500 | 101 | 201 | 501 | 102 | |||
| Flow Direction | [C] | U | One-Way | ||||||||||
| B | Two-Way | ||||||||||||
| Flow rate measurement range (B/min) Note 1 | [B] | U | 15 to 500 mL | 30 to 1,000 mL | 0.06 to 2.00 L | 0.15 to 5.00 L | 0.30 to 10.00 L | 0.6 to 20.0 L | 1.5 to 50.0 L | 3.0 to 100.0 L | 6 to 200 L | 15 to 500 L | 30 to 1,000 L |
| B | -500 to -15, 15 to 500 mL | -1,000 to -30, 30 to 1,000 mL | -2.00 to -0.06, 0.06 to 2.00 L | -5.00 to -0.15, 0.15 to 5.00 L | -10.00 to -0.30, 0.30 to 10.00 L | -20.0 to -0.6, 0.6 to 20.0 L | -50.0 to -1.5, 1.5 to 50.0 L | -100.0 to -3.0, 3.0 to 100.0 L | -200 to -6, 6 to 200L | -500 to -15, 15 to 500L | -1,000 to -30, 30 to 1,000 L | ||
| Type of Display | LED display (power lamp, status lamp) | ||||||||||||
| Usage conditions | Compatible fluid *2 | Clean air (JIS B 8392-1:2012 1.1.1 to 5.6.2), compressed air (JIS B 8392-1:2012 1.1.1 to 1.6.2), nitrogen gas | |||||||||||
| Argon, carbon dioxide gas, mixed gas (argon + carbon dioxide gas) | - | ||||||||||||
| Oxygen (When the oxygen specification is selected, the clean specification (wa) cannot be selected. It will automatically be the degreasing process specification.) | - | ||||||||||||
| temperature range | 0 to 50°C (no condensation) | ||||||||||||
| Pressure range | -0.09 to +1.00 MPa | -0.09 to +0.75 MPa | |||||||||||
| Pressure resistance | 1.5 MPa | ||||||||||||
| Operating ambient temperature, humidity | 0 to 50°C, 90% RH or less | ||||||||||||
| Storage temperature | -10 to +60℃ | ||||||||||||
| Accuracy *3 | Accuracy Note 4 | Within ±3% F.S. (outlet open air) (Guaranteed range depends on "measurement flow rate range") | |||||||||||
| Repeatability Note 5 | Within ±1% F.S. (outlet open air) | ||||||||||||
| Temperature characteristics | Within ±0.2% F.S./°C (15 to 35°C, 25°C reference) | ||||||||||||
| Pressure characteristics | ±5% F.S. or less (based on open air at outlet) | ±5% F.S. or less (based on 0.35 MPa) | |||||||||||
| Response time Note 6 | 50 ms or less | ||||||||||||
| Power supply voltage | DC18 to 30 V Ripple rate 1% or less | ||||||||||||
| Current consumption Note 7 | 45 mA or less | ||||||||||||
| Lead Note 8 | M12 both sides connector lead (3 m) Equivalent to AWG #23, 4-core | ||||||||||||
| Functions Note 9 Note 10 | (1) Gas type switching, (2) Flow rate totalization, (3) Peak hold, others | ||||||||||||
| Protective Structure | Equivalent to IP40 (IEC standard) | ||||||||||||
| Protection circuit Note 11 | Power supply reverse connection protection | ||||||||||||
| Vibration resistance Note 12 | 10 to 150 Hz, Max. 100 m/s2, XYZ directions, 2 hours each | ||||||||||||
| EMC Directive | EN55011, EN61000-6-2, EN61000-4-2/3/4/6/8 | ||||||||||||
| Mounting | Mounting orientation Note 13 | Vertical / Horizontal Mounting | |||||||||||
| Direct introduction section Note 14 | N/A | ||||||||||||
Note 1: Converted to volumetric flow rate under standard conditions (20°C, 1 atm (101 kPa), 65%). (For gases other than air, use 20°C, 1 atm (101 kPa), 0% RH)
Note 2: Please use a dry gas that does not contain corrosive components such as chlorine, sulfur, or acids, and a clean gas that does not contain dust or oil mist. When using compressed air, please use clean air of class 1.1.1 to 1.6.2 as specified in JIS B 8392-1:2012. Compressed air from compressors contains condensate (water, oxidized oil, contaminants, etc.). To maintain the function of this product, please install a filter, air dryer (min. pressure dew point 10°C or lower), and oil mist filter (maximum oil concentration 0.1 mg/m3) on the inlet (upstream) side of this product. (Please refer to the recommended circuit.)
A dedicated model is available for oxygen gas. To prevent fire accidents, do not use oxygen again if any fluid other than oxygen has been used even once.
Note 3: Compressed air is used for the adjustment and inspection of this product. For gases other than air, the accuracy is for reference only.
Note 4: The accuracy is based on CKD's standard flow meter and does not indicate absolute accuracy. Please note that repeatability, temperature characteristics, and pressure characteristics are not included in the ±3% F.S. accuracy.
Please consider separately depending on the operating environment and usage conditions.
Note 5: This refers to repeatability over a short period of time. Changes over time are not included. (For details, please refer to the product specification sheet.)
Note 6: The actual response time will vary depending on the piping conditions.
Note 7: This is the current when connected to 24 V DC with no load connected. Please note that the current consumption will change depending on the connection status of the load.
Note 8: The male side is straight, and the female side is angle. Tighten the M12 connector to a torque of 0.5 N⋅m or less.
Please note that tightening with excessive force may result in damage.
Note 9: The gas type switching function allows you to switch between argon, carbon dioxide, and argon 80% + carbon dioxide 20%. The measurement flow rate range after switching is as shown below. (For the oxygen type, 500 L/min model, and 1,000 L/min model, the gas type cannot be switched.)
Note 10: The accumulated flow rate is a calculated (reference) value. When using the accumulation storage function, please ensure that the number of saves does not exceed the memory device's access limit (maximum of 1,000,000 times). (Changes to various settings are also counted as accesses.)
Number of saves = operating time / 5 minutes < 1,000,000 times
When the instantaneous flow rate is 1% or less, it is not counted as accumulated flow rate.
Note 11: The protection circuit of this product is effective only against certain incorrect connections and load short-circuit, and does not protect against all types of incorrect connections.
Note 12: Depending on vibration conditions, communication errors may occur. Please install in a location with as little vibration as possible.
Note 13: This product measures changes in heat distribution caused by flow.
When installed vertically, the heat distribution may change due to convection, which can cause the zero point to shift.
Note 14: Piping conditions may affect accuracy. For more accurate measurement, provide a straight pipe section that is 10 times the inner diameter of the piping.
For the 500 L/min and 1,000 L/min models, please use piping with an inner diameter of 9 mm or more. If the inner diameter is 9 mm or less, accuracy may diminish.
Note 15: Please refer to a separate document for mass.
Specifications Table
| Part number | Connection port diameter | (A) dimension |
|---|---|---|
| FSM3-B**2CA1 | Rc1/2 | 80 |
| FSM3-B**2CF1 | G1/2 | 80 |
| FSM3-B**2CB1 | G1/2 | 95.4 |
| FSM3-B**2CC1 | NPT 1/2 | 80 |
| FSM3-L**2CA1 | Rc1/2 | 80 |
| FSM3-L**2CF1 | G1/2 | 80 |
| FSM3-L**2CB1 | G1/2 | 95.4 |
| FSM3-L**2CC1 | NPT 1/2 | 80 |
| FSM3-C**2CA1 | Rc1/2 | 80 |
| FSM3-C**2CF1 | G1/2 | 80 |
| FSM3-C**2CB1 | G1/2 | 95.4 |
| FSM3-C**2CC1 | NPT 1/2 | 80 |