Compact Flow Sensor Rapiflow FSM Series
Brand :
CKD
Caution
Product Description
[Features]
· Platinum sensor chip utilizing silicone micromachining
· Achieves unprecedented compact size and high-speed response through a newly proposed rectifying mechanism
· Can be mounted at the tip of the movable part closest to the measurement section, making it suitable for applications such as electronic component adsorption confirmation and leak testing as a thermal flow sensor, Rapiflow
Drawing
FSM-X Series
· Sensor head single item
· With flow path block
· With ⌀4 quick connect fitting
· With M5
· Option cable
FSM-V Series (Common to analog output type and switch output type)
· FSM-V-*V3-R*-H2
(Lead L-shaped type, straight type ⌀1.8 Air Fiber)
(Lead L-shaped type, straight type ⌀1.8 Air Fiber)
· FSM-V-*H3-R*-H2
(Lead straight type, straight type ⌀1.8 Air Fiber)
(Lead straight type, straight type ⌀1.8 Air Fiber)
· FSM-V-*V3-R*-H4
(Lead L-shaped type, straight type ⌀4 one-touch)
(Lead L-shaped type, straight type ⌀4 one-touch)
· FSM-V-*H3-R*-H4
(lead straight type, straight type ⌀4 one-touch)
(lead straight type, straight type ⌀4 one-touch)
· FSM-V-*V3-R*-HL4
(lead L-shaped type, L-shaped type ⌀4 one-touch)
(lead L-shaped type, L-shaped type ⌀4 one-touch)
· FSM-V-*H3-R*-HL4
(Lead straight type, L-shaped ⌀4 one-touch)
(Lead straight type, L-shaped ⌀4 one-touch)
· FSM-V-*V3-R*-M5
(Lead L type, port diameter M5)
(Lead L type, port diameter M5)
· FSM-V-*H3-R*-M5
(Lead straight type, port diameter M5)
(Lead straight type, port diameter M5)
*The external appearance of the front seat differs between the analog output type and the switch output type.
Product Specification
FSM-X Series Specifications
| Part number | Analog output type | ||||||||
|---|---|---|---|---|---|---|---|---|---|
| Items | FSM-X-AR005 | FSM-X-AR010 | FSM-X-AR050 | FSM-X-AR100 | FSM-X-AF005 | FSM-X-AF010 | FSM-X-AF050 | FSM-X-AF100 | |
| Flow rate range (L/min) (Note 1) | -0.5 to +0.5 | -1 to +1 | -5 to +5 | -10 to +10 | 0 to +0.5 | 0 to +1 | 0 to +5 | 0 to +10 | |
| Usage conditions | Compatible fluid (Note 2) | Clean air (JIS B 8392-1:2012 (ISO 8573-1:2010) 1.1.1 to 1.6.2), nitrogen | |||||||
| Maximum operating pressure (MPa) | 0.2 | ||||||||
| Minimum operating pressure (MPa) | -0.09 | ||||||||
| Pressure Resistance (MPa) | 0.3 | ||||||||
| Ambient temperature / humidity (°C) | 0 to +50°C, 80% RH or less | ||||||||
| Operating fluid temperature (°C) | 0 to +50 (no condensation) | ||||||||
| Storage ambient temperature (°C) | -20 to +60 (no condensation) | ||||||||
| Output | 1 analog output (1-5 V voltage output, load impedance 50 kΩ or more) Note 3 | ||||||||
| Accuracy (*4) | Linearity | Nonlinear characteristics | |||||||
| Pressure characteristics | Bidirectional type: +/-5% F.S. or less (-0.09 to +0.2 MPa, based on 0.1 MPa) Unidirectional type: +/-10% F.S. or less (-0.09 to +0.2 MPa, based on 0.1 MPa) | ||||||||
| Temperature characteristics | Bidirectional type: +/-0.3% F.S./°C or less (0 to +50°C, 25°C reference) Unidirectional type: +/-0.6% F.S./°C or less (0 to +50°C, 25°C reference) | ||||||||
| Repeatability (repeatability) (Note 5) | +/- 2% F.S. or less | ||||||||
| Response time (Note 6) | 5 ms or less (8 ms or less at 10 L/min) | ||||||||
| External leakage (Note 7) | 1 mL/min or less (sensor head single item), 2 mL/min (with flow path block) | ||||||||
| Current consumption (Note 8) | 30 mA or less | ||||||||
| Power supply voltage | 24 V DC (21.6 to 26.4 V DC), ripple 1% or less | ||||||||
| Power supply voltage fluctuation | +/-2% F.S. or less (21.6 to 26.4 V) | ||||||||
| Lead | ⌀2.9 mm 3-core (⌀0.38 mm insulator outer diameter ⌀0.8 mm) | ||||||||
| Connector | Product side | SM03B-SRSS-TB (by JST), no locking mechanism | |||||||
| Compatible Connector | Housing | SHR-03 V-S (manufactured by JST) | |||||||
| Connector pin | SSH-003T-P0.2-H (manufactured by JST) | ||||||||
| Mounting | Mounting posture | Vertical / Horizontal Mounting | |||||||
| Straight pipe at inlet | N/A | ||||||||
| Vibration resistance | 10 to 150 Hz, 1.5 mm double amplitude, maximum 10 G, 2 hours in each of X, Y, and Z directions | ||||||||
| EMC Directive | EN61000-6-4, EN61000-6-2 | ||||||||
| Weight (g) | No Symbol | Approx. 4 (cable not included) | |||||||
| H04 | Approx. 17 (cable not included) | ||||||||
| M05 | Approx. 17 (cable not included) | ||||||||
- Note 1: The flow rate is converted to the volumetric flow rate at 20°C and 1 atmosphere (101 kPa).
- Note 2: Please use air that does not contain corrosive components such as chlorine, sulfur, or acids. When using compressed air, please use clean air of class 1.1.1 to 1.6.2 according to JIS B 8392-1:2012 (ISO 8573-1:2010).
Compressed air from the compressor contains condensate (water, oxidized oil, contaminants, etc.). To maintain the functionality of this product, please install a filter, air dryer, and oil mist filter on the inlet (upstream) side of this product before use.
When using this product for adsorption verification, be sure to install an air filter between the adsorption nozzle and this product to prevent the intake of contaminants.
- Note 3: The flow rate output of this product does not indicate the absolute value of the flow rate.
*About Connections Load
The output impedance of the analog output section is 1kΩ. If the impedance of the connected load is low, the error in the output value will increase. Please check the error due to the impedance of the connected load before use.
■ Sample calculation
· Output impedance of FSM-X: Ro = 1kΩ
· Internal impedance of the load: Rx = 1MΩ
· Output value = (1 - Ro / (Ro + Rx)) x 100% = (1 - (1kΩ / (1kΩ + 1MΩ))) x 100%
⇒ Error in output value = approximately 0.1%
*About wiring resistance
The voltage of this product is measured at the connector section. When using the option cable (FSM-X-C33), please note that the voltage may change due to the cable's wiring resistance (0.23Ω/m or less).
■ Sample calculation
· Wiring resistance of option cable (FSM-X-C33) (3 m): 0.23Ω/m x 3 m = 0.69Ω
· Voltage generated on the power line = product current consumption (= 30 mA) x wiring resistance 0.69Ω = approx. 0.02 V
· Output value error = 0.02 V / 4 V (full scale) = 0.5% F.S. -
Accuracy conditions: Temperature 25+/-3°C, supply voltage DC24+/-0.01 V
F.S. is defined as an analog output of 1 to 5 V. - Note 5: When the flow rate is ON, the average value of data collected over 20 seconds at a 0.5 ms sampling interval is considered as one measurement, and the repeatability is based on 10 consecutive ON-OFF cycles of the flow rate. Changes over time are not included.
- Note 6: This is the time required for the output to reach 80% of the full-scale flow rate after flow rate detection. The response time varies depending on the piping conditions.
- Note 7: This value is measured under an internal pressure of 0.2 MPa in an environment of 25°C +/- 3°C. This is the initial value and does not include changes over time.
- Note 8: This is the current when connected to 24 V DC with no load connected. Please note that the current consumption may vary depending on the load connection status and other factors.
| Pin No. | Line Color | Type of Signal |
|---|---|---|
| 1 | Brown | Power supply +24 V DC |
| 2 | Blue | Power - GND |
| 3 | Black | Analog output (1 to 5 V) |
FSM-V Series sensor main body specifications
| Part number | Analog output type | Switch output type | |||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Items | FSM-V-A-R0005 | FSM-V-A-R0010 | FSM-V-A-R0050 | FSM-V-A-R0100 | FSM-V-A-R0500 | FSM-V-A-R1000 | FSM-V-N/P-R0005 | FSM-V-N/P-R0010 | FSM-V-N/P-R0050 | FSM-V-N/P-R0100 | FSM-V-N/P-R0500 | FSM-V-N/P-R1000 | |
| Flow rate range (L/min) (Note 7) | -0.05 to +0.05 | -0.1 to +0.1 | -0.5 to +0.5 | -1 to +1 | -5 to +5 | -10 to +10 | -0.05 to +0.05 | -0.1 to +0.1 | -0.5 to +0.5 | -1 to +1 | -5 to +5 | -10 to +10 | |
| (Reference) Compatible nozzles for adsorption and desorption use | ⌀0.1 nozzle | ⌀0.2 Nozzle | ⌀0.3 Nozzle | Collet nozzle | ⌀0.1 nozzle | ⌀0.2 Nozzle | ⌀0.3 Nozzle | Collet nozzle | |||||
| Usage conditions | Compatible Fluid | Clean air (JIS B 8392-1:2012 (ISO 8573-1:2010) 1.1.1 to 5.6.2), compressed air (JIS B 8392-1:2012 (ISO 8573-1:2010) 1.1.1 to 1.6.2) (Note 1), nitrogen gas | |||||||||||
| Maximum operating pressure (MPa) | 0.2 | ||||||||||||
| Maximum operating pressure (MPa) | -0.09 | ||||||||||||
| Pressure resistance (MPa) | 0.3 | ||||||||||||
| Ambient temperature/humidity (℃) | 0 to +50, 90% RH or less (no condensation) | ||||||||||||
| Operating fluid temperature (℃) | 0 to +50 | ||||||||||||
| Display | Power display (green) | Power display (green), switch output display (yellow) | |||||||||||
| Output | 1-point analog output (*2) (1–5 V voltage output, load impedance 50 kΩ or more) | 2-point switch output (*3) (NPN or PNP open collector output, 30 V DC or less, 50 mA or less, compatible with PLC and relays) | |||||||||||
| Accuracy (*4) | Linearity | Within +/-5% F.S. (0.1 MPa, flow rate range +/-100% F.S.) | - | ||||||||||
| Pressure Properties | +/-5% F.S. or less (-0.09 to +0.2 MPa, based on 0.1 MPa) | - | |||||||||||
| Temperature Properties | +/-0.2% F.S./°C or less (15 to 35°C, 25°C reference) | - | |||||||||||
| Repeatability (repeatability accuracy) | +/- 1% F.S. or less | +/- 2% F.S. or less | +/- 2% F.S. or less | ||||||||||
| Response time | 5 ms or less (sensor only, when 90% of the final output voltage is reached) (Note 5) | ||||||||||||
| Power supply voltage | DC 12/24 V (10 to .826.4 V) | ||||||||||||
| Current Consumption | 30 mA or less | ||||||||||||
| Lead | ⌀2.6 3-core (0.15 mm2 insulator outer diameter ⌀0.81) 3 m | ⌀2.6 4-core (0.15 mm2 insulator outer diameter ⌀0.81) 3 m | |||||||||||
| Mounting | Mounting posture | Vertical / Horizontal Mounting | |||||||||||
| Introduction Straight Pipe | N/A | ||||||||||||
| Protective Structure | IEC standard IP40 | ||||||||||||
| Vibration resistance | 10 to 150 Hz, 1.5 mm double amplitude, maximum 10 G, 2 hours in each of X, Y, and Z directions | ||||||||||||
| EMC Directive | EN55011, EN61000-6-2, EN61000-4-2/3/4/6/8 | ||||||||||||
| Weight (g) | Approx. 8 (excluding lead and fitting) | ||||||||||||
- Note 1: Please use air that does not contain corrosive components such as chlorine, sulfur, or acids.
When using compressed air, please use clean air of class 1.1.1 to 1.6.2 as specified in JIS B 8392-1:2012 (ISO 8573-1:2010).
Compressed air from the compressor contains condensate (water, oxidized oil, contaminants, etc.). To maintain the functionality of this product, please install a filter,
air dryer, and oil mist filter on the inlet (upstream) side of this product.
When using this product for adsorption confirmation, be sure to install an air filter between the adsorption nozzle and this product to prevent the intake of contaminants.
- Note 2: The analog output indicates 3 V when the flow rate is 0. When the lead is on the right side and you view the main body with the fluid flowing to the right, the output shifts toward 5 V. In the case of reverse flow, the output shifts toward 1 V.
- Note 3: The switch output uses a single threshold detection method with fixed hysteresis, and can be set across the entire flow rate range by turning the trimmer. Additionally, the operating modes of OUT1 and OUT2 are opposite.
-
Accuracy conditions: Temperature 25+/-3°C, supply voltage DC24+/-0.01 V
In this specification, F.S. (Full Scale) indicates the flow rate range. For example, if the flow rate range is -10 to +10 L/min, the F.S. is 20 L/min. - Note 5: The response time varies depending on the piping conditions.
- Note 6: Please use clean, dry gas that does not contain corrosive components such as chlorine, sulfur, or acids, and is free of dust and oil.
When using compressed air, please use clean air of class 1.1.1 to 1.6.2 according to JIS B 8392-1:2003. Compressed air from the compressor contains condensate (water, oxidized oil, contaminants, etc.).
To maintain the function of this product, please install a filter, air dryer (min. pressure dew point 10°C or lower), and oil mist filter (maximum oil content 0.1 mg/m3) on the inlet (upstream) side of this product before use.
When using this product for adsorption verification, be sure to install an air filter between the adsorption nozzle and this product to prevent the intake of contaminants. - Note 7: Converted to volumetric flow rate at 20°C and 1 atmosphere (101 kPa).
FSM-V Series Separate Display Specifications (Dedicated for Analog Output Type) (Note 8)
| Part number | Remote Indicator | ||||||
|---|---|---|---|---|---|---|---|
| Items | FSM-V-DN/P-R0005 | FSM-V-DN/P-R0010 | FSM-V-DN/P-R0050 | FSM-V-DN/P-R0100 | FSM-V-DN/P-R0500 | FSM-V-DN/P-R1000 | |
| Compatible analog output type part numbers | FSM-V-A-R0005 | FSM-V-A-R0010 | FSM-V-A-R0050 | FSM-V-A-R0100 | FSM-V-A-R0500 | FSM-V-A-R1000 | |
| Display | Type of Display | Flow rate display (3-digit 7-segment, orange), operation and switch output display (orange) | |||||
| Minimum Display Unit (Note 9) | 0.1 mL/min (Note 7) | 1 mL/min (Note 7) | 0.01 L/min (Note 7) | 0.1 L/min (Note 7) | |||
| Output | 2-point switch output (NPN or PNP open collector output, 30 V DC, 50 mA max, voltage drop 2.4 V, compatible with PLC and relays) 1-point analog output (1–5 V voltage output, load impedance 50 kΩ or more) | ||||||
| Power supply voltage | DC12/24 V (10.8 to 26.4 V) | ||||||
| Current Consumption | 50 mA or less (indicator only) | ||||||
| Lead | ⌀3.7, 5-core (0.2 mm2 insulator outer diameter ⌀1.0) 1 m | ||||||
| Available Functions | Flow rate display, flow rate peak hold, switch output, analog output | ||||||
| Operating ambient temperature, humidity | 0 to +50°C, 85% RH or less (No condensation) | ||||||
| Protective Structure | IEC standard IP40 | ||||||
| EMC Directive | EN55011, EN61000-6-2, EN61000-4-2/3/4/6/8 | ||||||
| Weight (g) | Approx. 70 (including 1 m lead) | ||||||
- Note 7: Converted to volumetric flow rate at 20°C and 1 atmosphere (101 kPa).
- Note 8: The separate display unit is dedicated for analog output type. Please note that the switch output type cannot be connected.
- Note 9: This indicates the minimum display unit of the flow rate and does not guarantee display accuracy.