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XY Stage
Cost reduction with economical parts and design time reduction, quality assurance, cost reduction

Specifications and Features
Purpose/Function
Transport/Movement Positioning/Clamp Processing

Quickly move the vacuum table holding the workpiece to the preset XY position.
Move the vacuum table to any XY position to process the workpiece.
Between the two tables, there are three spaces connected to the suction holes on the table surface.
By switching the valves connected to each space ON/OFF, workpieces of different sizes can be held by suction.
Select an actuator that can withstand the moments at the processing point.
XY Stage
※ This example is for design reference only. Equipment components may differ from the actual shape.
No. Component Economy Type Number Specification Quantity Unit Price
Actuator C-KSC6005-B1-500-F5 Drive method: Ball screw
Cover: Yes
Lead (mm): 5
Repetitive positioning accuracy (μm): ±10
Motor mounting type: In-line type
1 MYR 1508.88/Unit
Coupling C-SCPW21-5-6 Outer diameter A(φ): 21
Allowable torque range (Nm): 0.05~1.00
Allowable eccentricity range (mm): 0.02~0.2
Maximum rotational speed (r/min): 10000
1 MYR 123.66/Unit
Coupling C-SCPW34-8-10 Outer diameter A(φ): 34
Allowable torque range (Nm): 3.01~5.00
Allowable eccentricity range (mm): 0.02~0.2
Maximum rotational speed (r/min): 10000
1 MYR 160.70/Unit
※ Kindly check MISUMI eCatalog for latest information.
※ The price on the product list is the starting price for that product.
    Product details (Price, leadtime and availability) may be subjected to updates.
    Kindly check MISUMI eCatalog for latest information.